Fine Semitech(FST), which was established in 1987, is an innovative manufacturer of semiconductor and FPD products. FST provides IC/LCD pellicles, energy saving chillers. FST newly develops the state of the art EUV light source “EUVO Series” as a result of its continuous R&D activities.

FST’s EUVO™ (ExtremeUltra-Violet Oscillator) is based on high-order harmonic generation driven by ultrafast laser. High-order harmonics have several advantages such as excellent coherence, wavelength tunability, ultra-shot duration, and table top scale.

EUVO™ is compact, easy to use, reliable, and cost effective EUV light sources. EUVO™ is uniquely suited for metrology and research applications. The optical specification for EVU include wavelength of 13.54 ±0.05nm, repetition of 1kHz, radiation power of >30nW@13.5nm, divergence of < 0.3m rad, shot-to-shot power stability of <2% (3􀐞).

A spokesperson of the company said “We are continuing to do our best to satisfy our customers by providing the qualified product to take upon our mission of becoming “Leader in the industry in 21st century”. And we are striving in research with our restless passion and through our technology progress we will combine profitability and growth rate.”

 
 

 
 
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