[INQ. NO. 2401E11] Established in 2001, EQ GLOBAL Inc. is a company that conducts RF product, RF repair, and back-end test equipment repair business.
EQ GLOBAL launched its own RF products (RF Generator, RF Matcher) in 2009, backed by years of RF technology and know-how, and is currently supplying RF Generator, RF Matcher, and RF Filter products to domestic and overseas customers.
EQ GLOBAL is located in Yongin-si, Gyeonggi-do, South Korea, and has branches in China and Singapore.
RF generator
An RF generator is a device that converts alternating current (AC) power into RF high-frequency power in a plasma-using system during the semiconductor and display manufacturing processes.

RF matcher
An RF matcher is a device that delivers maximum power by matching the impedance (50Ω) of the chamber and the RF power source in real time in the plasma system of semiconductor and display processes.

RF filter
An RF filter is a product that blocks noise from the chamber of semiconductor and display process equipment. It increases the efficiency of the semiconductor and display manufacturing process and reduces interference between products in the facility.
RF filters have different names depending on the location and function applied on the chamber, and include Temp Control System (TCS) filter, Thermo Coupler (TC) filter, heater filter, and (Electrostatic Chuck (ESC) filter.

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In particular, New Power Plasma is competing with global companies including ones in the United States by becoming the world’s second company localizing RPG products. And it continuously maintains its development every year based on ingenious technical prowess.
Precise low power is consumed by controlling the 13.56MHz phase shift. It realizes various RF output behavior modes and quick responsiveness. It also realizes an intuitive Arc function and high-speed response (within 5 μs). The RF Generator secures RF output stability for the load and cable length changes by applying a 90° hybrid combiner.
power supply), a core part of plasma used in wafer, and LCD surface processing in the semiconductor, LCD and OLED industry, a matching network (impedance matching), and a remote plasma cleaning generator (cleaning residues in a chamber, RPG).
The RF generator has a lot of advantages. It is suitable for full digital control-based 13.56MHz/3kW level LCD processes. It increases the quick-response control by applying a recent power conversion platform and improves the system power conversion efficiency up to 83%.
The RF generator has a lot of advantages. It is for full digital control-based 13.56MHz/3kW level LCD processes. It increases the quick-response control by applying a recent power conversion platform and improves the system power conversion efficiency up to 83%. Precise low power is consumed by controlling the 13.56MHz phase shift. It realizes various RF output behavior modes and quick responsiveness. It also realizes an intuitive Arc function and high-speed response (within 5 μs). The RF Generator secures RF output stability for the load and cable length changes by applying a 90° hybrid combiner.

