
Developed by Jusung Engineering, SDP-CVD (Space Divided Plasma Chemical Vapor Deposition) is considered to be one of the most advanced and promising technologies, as the system can handle all of the deposition processes by PE-CVD, LP-CVD and ALD. In combination with new-concept plasma technology, the SDP-CVD provides improved productivity up to twice that of PE-CVD and LP-CVD. It is an innovative system designed to manage high quality film coating even the temperature is below 400° by maximizing the merits of the ALD system and tackling PE-CVD system’s drawback of wafer damage from plasma.
Jusung Engineering is a leading process equipment technology provider for the semiconductor, flat panel display, solar cell, and lighting industries. Since its founding in 1995, JUSUNG’s innovations enable customers and partners to produce advanced technology products while maintaining cost competitiveness and shortening time to market.
The company’s emphasis on generating unique and innovative products has led to over 1850 global patents and multiple prestigious awards such as Korea’s 10 Best Technologies and World Class 300 Company certificate of designation. The company’s world class R&D center, manufacturing, and administrative offices are located in Gyeonggi, outside Seoul, with sales and service centers around the world in China, Taiwan, Japan, the USA, Germany, and France.
Jusung Engineering Co., Ltd.
240 Opo-ro,Opo-eup, Gwangju, Gyeonggi-do, Korea
Tel:(82-31) 760-7108 Fax:(82-31) 760-7109
E-mail: heejin.kim@jusung.com
Website: http://www.jusung.com





