One of AVACO’s premium products is the sputtering system, which has been developed and continuously innovated since 2004. AVACO’s sputtering technology is highly recognized as an outstanding technology for its superior performance not only in flat panel display but also in solar technology and thin-film coating.

The sputtering equipment is used in the process of making thin-film solar cells where different materials are coated to form various layers such as metal electrode, precursor, and transparent conductive oxide layer.

Sputtering is a physical vapor deposition method, which involves plasma bombardment. It is commonly used in ITO and metal electrode coating for TFT arrays, as well as black matrix composition for color filters in FPD manufacturing. As a method of thin-film deposition in solar cells, the sputtering system deposits metals or metallic-oxides on a substrate in a vacuum chamber.

AVACO’s sputtering system can operate as either Vertical in-line (SSI) or Horizontal Cluster (SSC). The SSI series is designed to minimize particle generation through non-contact transferring technology, while maximizing target utilization rate using magnetic cathode.

The size of the substrate measures up to the 8th generation (2200mm x 2500mm) with up to 60 seconds tact time. Average heating temperature of a substrate is approximately 250°C. In the case of the SSC series, the tact time can take up to 80 seconds, and average heating temperature is approximately 150°C with ±7.5°C temperature uniformity.

Through its optimized chamber design, AVACO developed a lightweight sputtering system that is compact in size yet with high operating performance. AVACO also attained manufacturing technologies on annealing furnace and buffer layer tool through research and development.

Furthermore, AVACO’s PV product portfolio includes Edge Deletion, Bus Bar Attach, EVA Placement, J-Box Attach, and Framing tool. AVACO completed the mass production validation on these products.

A spokesperson of the company said, “The sputtering system was the gateway in establishing AVACO as one of the leading companies in the industry.” He further praised the 8th-generation sputtering machine developed in 2010 as one of the world’s premium products for the use of in-line automated processing to maximize the manufacturing process.

Kim elaborated further that the cutting edge technology in vacuum deposition and proven mass production capability makes AVACO’s manufacturing machines unmatched by its competitors. To ensure top quality control, AVACO instills a rigorous process of systematic inspections, while skilled technicians examine and eliminate deviations.

 
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